Fabrication Facilities

Electron-beam lithography system

For nanometer-scale fabrication

Photolithography and evapolation systems

For micrometer-scale fabrication

Scanning electron microscope

For checking devices fabricated

Low Temperature Facilities

Helium reliquefier, 3He refrigerator, Dilution refrigerator

ASEM Measurement

Innovation Garage

We aim for social implementation in the medical field.

Biomedical sensing system

A measurement system to evaluate biological tissues such as bones, ligaments, and organs.

Industrial sensing system

Practical application in industrial non-destructive testing.