Fabrication and characterization of nanocarbon-based nanodevices
Nanocarbons such as carbon nanotubes (CNTs) and graphene are expected for fabrication of devices owing to their unique structures and superior electrical properties. In this department, synthesis of nanocabons, fabrication and characterization of nanocarbon-based nanodevices are investigated.
Equipments
Low-temperature probers station
Atomic force microscope
CVD
CVD
Probers station
Plasma etching system