Abstract
The direct modifications of magnetic domain structures and magnetic anisotropy in Co-based nanostructures were studied. A Co rectangular structure of 5.1 µm length × 0.8 µm width was fabricated from a 15-nm-thick Co thin film deposited on a Pt layer on a SiO2/Si substrate by conventional processes of electron beam lithography and lift-off. The magnetic domain structure of the Co rectangle was divided by atomic force microscope (AFM) nano-oxidation. It was found that the magnetic domain structures could be controlled by AFM lithography. It was also proposed that the magnetic anisotropy could be directly modified by the nanolithography technique.